Microstructure of TiN Coatings by EBSD Techniques
نویسندگان
چکیده
منابع مشابه
Determination of Residual Stress of PACVD Nanostructure TiN Coatings by GIXRD Method
In this study, thin layers of titanium nitride (TiN) were deposited on H13 steel substrates at different duty cycles and temperature of 520 ˚C using plasma assisted chemical vapor deposition (PACVD). Uniaxial residual stress was calculated by X-ray diffraction (XRD) and Sin2 Ψ method. Then the residual stress of the samples were measured by Grazing Incidence X-ray Diffraction (GIXRD) method and...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2002
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927602106374